Electric Actuator for Clean Room – Robot Cylinder Cleanroom – Reach clean room level by attaching vacuum port | CLASS 10 ISO14644. TOYO Automation Co., Ltd. – tiên phong của công nghiệp 4.0 và FA solution. Thành lập năm 2000. TOYO có hơn 20 năm kinh nghiệm chuyên về sự phát triển actuator và robot. Kết nối với nhiệm vụ tham vọng của ngành công nghiệp 4.0. TOYO còn là đối tác chiến lược OEM cho nhiều Hãng Robot Cylinder – Electric Actuator khác như: YAMAHA, DENSO, CKD…
Công ty Cổ phần Minh Việt xin được giới thiệu ứng dụng và các dòng sản phẩm Electric Actuator for Clean Room – Robot Cylinder Cleanroom trong công nghiệp bán dẫn, SMT, nano systems.
Electric Actuator for Clean Room – Robot Cylinder TOYO
Clean room level (to ISO level: class 10): By using special steel strip to decrease friction also reduce dust occurring, and maintaining by clean room grade lubricating grease, actuator can reach ISO spec. class 10 level. Bằng cách sử dụng dải thép đặc biệt để giảm ma sát cũng làm giảm bụi xuất hiện và duy trì bằng mỡ bôi trơn cấp phòng sạch, thiết bị truyền động có thể đạt thông số ISO. lớp 10 cấp.
| Cỡ hạt bụi Micro particle number (granule/m3) | 0.1μｍ | 0.3μｍ | 0.5μｍ | 1μｍ |
| Class10 | 10 | – | – | – |
| Class100 | 100 | 10 | 4 | – |
| Class1000 | 1000 | 102 | 35 | 4 |
| Special material applies to the steel strip contact surface to decrease friction and prevent dust from occuring. Vật liệu đặc biệt áp dụng cho bề mặt tiếp xúc của dải thép để giảm ma sát và ngăn bụi bám vào.
| Greasing nozzle for maintenance. Use cleanroom grade grease, easy to maintain. External lubrication nozzles are standard part of GCH/ CGCH series product, also are optional for others. Vòi bôi trơn để bảo trì. Sử dụng mỡ cấp phòng sạch, dễ bảo dưỡng. Vòi bôi trơn bên ngoài là một phần tiêu chuẩn của sản phẩm dòng GCH / CGCH, cũng là tùy chọn đối với những loại khác.
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Thông số kỹ thuật
• Kiểm tra SGS đánh giá môi trường CLASS 10 được chứng nhận.
• Thiết kế bên ngoài khép kín ngăn ngừa sự xâm nhập của cơ thể lạ.
• Cổng khí nén loại bỏ các hạt được tạo ra trong quá trình hoạt động.
Các ứng dụng
• Các cleanroom-rated linear actuator của TOYO là hoàn hảo cho các ứng dụng chọn và đặt, xử lý vật liệu và lắp ráp.
• Độ tin cậy cao của mô-đun tuyến tính được xếp hạng trong phòng sạch – cleanroom-rated linear modules của TOYO khiến chúng trở thành lựa chọn lý tưởng cho các ứng dụng bán dẫn và chế biến thực phẩm.
Các dòng sản phẩm Electric Actuator for Clean Room – Robot Cylinder TOYO
GCH / GCY / ECH / ECB / CGCH / CCB / LCF Series
| Item | Driven Mode | Model Specification | Lead(mm) | lntake air (Nl/min) | Item | Driven Mode | Model Specification | Lead (mm) | lntake air (Nl/min) | |
| 1 | Ball Screw | GCH4 | 2 | 15 | 12 | Ball Screw | ECH17 | 20 | ||
| 6 | 15 | 40 | ||||||||
| 12 | 15 | 13 | ECH22 | 5 | ||||||
| 20 | 15 | 10 | ||||||||
| 2 | GCH5 | 2 | 15 | 25 | ||||||
| 5 | 20 | 40 | ||||||||
| 10 | 40 | 14 | ECH17M | 5 | ||||||
| 20 | 80 | 10 | ||||||||
| GCH8 | 5 | 30 | 20 | |||||||
| 3 | ||||||||||
| 10 | 60 | 32 | ||||||||
| 20 | 110 | 15 | ECH22M | 5 | ||||||
| 4 | GCH12 | 5 | 10 | |||||||
| 10 | 25 | |||||||||
| 20 | 40 | |||||||||
| 32 | 16 | Timing Belt | ECB5 | 40 | 80 | |||||
| 5 | GCH5S | 2 | 17 | ECB6 | 40 | 100 | ||||
| 6 | GCH8S | 5 | 18 | ECB10 | 32 | 150 | ||||
| 6 | GCY4 | 2 | 15 | 19 | ECB14 | 40 | 180 | |||
| 6 | 15 | 20 | ECB17 | 40 | 200 | |||||
| 12 | 15 | 21 | ECB22 | 40 | 250 | |||||
| 2 | 15 | 22 | Ball Screw | CGCH4 | 2 | 15 | ||||
| 7 | GCY5 | 5 | 20 | 6 | 15 | |||||
| 10 | 40 | 12 | 15 | |||||||
| 20 | 80 | 20 | 15 | |||||||
| GCY8 | 5 | 30 | 23 | CGCH5 | 2 | 15 | ||||
| 8 | ||||||||||
| 10 | 60 | 5 | 20 | |||||||
| 20 | 110 | 10 | 40 | |||||||
| 9 | GCY12 | 5 | 20 | 80 | ||||||
| 10 | 24 | CGCH8 | 5 | 60 | ||||||
| 20 | 10 | 110 | ||||||||
| 32 | 20 | 80 | ||||||||
| 5 | 25 | Timing Belt | CCB10 | 32 | 180 | |||||
| 10 | ECH14 | 10 | ||||||||
| 26 | Linear Motor Robot | LCF7 | – | 350 | ||||||
| 20 | ||||||||||
| 27 | LCF15 | – | 400 | |||||||
| 32 | ||||||||||
| 28 | LCF20 | – | 450 | |||||||
| 11 | ECH17 | 5 | ||||||||
| 10 | 29 | LCF30 | – | 500 |
GCH series – Integrated Linear Bearings Electric Actuator
GCY series – Integrated Linear Bearings Electric Actuator-Rod Type
ECH series – Ball Screw Type Electric Actuator
ECB series – Belt Type Electric Actuator
CGCH series – Integrated Linear Bearings Servo Cylinder-Clean Room Type
CCB series – Belt Type Servo Cylinder
LCF series – Iron Core Linear Motor Robot
Các series phòng sạch phổ biến của TOYO
Electric Actuator for Clean Room – Robot Cylinder GCH4
● Ball screw
Outer dia & Precision grade：Ø10& C7 Rolled Ballscrews (mm)
Lead: 2/6/12(mm)
Maximum Rotating speed: 3000 / 3600 / 3600 (rpm)
Maximum linear speed: 100 / 360 / 720 (mm/s)
Basic dynamic load rating Ca : 2265 /2537 / 1740 (N)
Basic static load rating Coa: 4839 / 4569 / 3052 (N)
Load factor : 1.2 / 1.35 / 1/35
● Linear Guide
Dynamic horizontal / 100 Km of travel : 4835 (N)
Dynamic horizontal / 1000 Km of travel : 2246 (N)
Dynamic horizontal / 10000 Km of travel : 1040 (N)
Static horizontal : 12678 (N)
● Common Spec
Repeatability : ±0.005(mm)
Start torpue : 2 (N. cm)
Allowable input torque : 1.1 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-1000 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder GCH5
Ball screw Spec.
Ballscrew Accuracy Grade Code : L / C
Ballscrew Accuracy Grade : C7 Rolled Ballscrews / G5 Ground Ballscrews
Repeatability : ±0.005 / ±0.003 (mm)
Stroke : 50-1050 / 50-3000 (mm) (50 increments)
● Ball screw
Outer dia & Precision grade：Ø12
Lead: 2 / 5 / 10 / 20 (mm)
Maximum Rotating speed: 3000/3600/3600/3600 (rpm)
Maximum linear speed: 100 / 300 / 600 / 1200 (mm/s)
Basic dynamic load rating Ca : 2411 / 4829 / 4680 / 11284 (N)
Basic static load rating Coa : 5779 / 7836 / 7649/ 20410
Load factor : 1.2 / 1.2 / 1.35 / 1.35
● Linear Guide
Dynamic horizontal / 100 Km of travel : 5904 (N)
Dynamic horizontal / 1000 Km of travel : 2736 (N)
Dynamic horizontal / 10000 Km of travel : 1275 (N)
Static horizontal : 16904 (N)
● Common Spec
Start torpue : 7 (N.cm)
Allowable input torque : 1.1 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder GCH8
Ball screw Spec.
Ballscrew Accuracy Grade Code : L / C
Ballscrew Accuracy Grade : C7 Rolled Ballscrews / G5 Ground Ballscrews
Repeatability : ±0.005 / ±0.003 (mm)
Stroke : 50-1250 / 50-700 (mm) (50 increments)
● Ball screw
Outer dia & Precision grade：Ø16
Lead: 5 / 10 / 20 (mm)
Maximum Rotating speed: 3600/3600/3600 (rpm)
Maximum linear speed: 300 / 600 / 1200 (mm/s)
Basic dynamic load rating Ca : 8042/ 6300 / 4152 (N)
Basic static load rating Coa : 15088 / 11596 / 7439 (N)
Load factor : 1.2 / 1.35 / 1.35
● Linear Guide
Dynamic horizontal / 100 Km of travel : 18620 (N)
Dynamic horizontal / 1000 Km of travel : 8643 (N)
Dynamic horizontal / 10000 Km of travel : 4012 (N)
Static horizontal : 34230 (N)
● Common Spec
Start torpue : 10 (N.cm)
Allowable input torque : 2.2 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder GCH12
Ball screw Spec.
Ballscrew Accuracy Grade Code : L / C
Ballscrew Accuracy Grade : C7 Rolled Ballscrews / G5 Ground Ballscrews
Repeatability : ±0.005 / ±0.003 (mm)
Stroke : 50-1250 / 50-700 (mm) (50 increments)
● Ball screw
Outer dia & Precision grade：Ø16
Lead: 5 / 10 / 20 / 32 (mm)
Maximum Rotating speed: 3600/3600/3600/3600 (rpm)
Maximum linear speed: 300 / 600 / 1200 / 1920 (mm/s)
Basic dynamic load rating Ca : 11570 / 6300 / 4152 / 7326 (N)
Basic static load rating Coa : 23030 / 11596 / 7439 / 14157 (N)
Load factor : 1.2 / 1.2 / 1.35 / 1.75
● Linear Guide
Dynamic horizontal / 100 Km of travel : 55304(N)
Dynamic horizontal / 1000 Km of travel : 25670 (N)
Dynamic horizontal / 10000 Km of travel : 11915 (N)
Static horizontal : 95083 (N)
● Common Spec
Start torpue : 10 (N.cm)
Allowable input torque : 3.1 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder GCY4
Repeatability：±0.01(mm)
Ball Screw Lead：2/6/12(mm)
Maximum Speed ：100/300/600(mm/s)
Maximum Payload (Horizontal)：25/20/12(kg)
Maximum Payload (Vertical)：8/5/2(kg)
Rated Thrust：424/141/71(N)
Stroke/Pitch ：50-500 / 50 mm Pitch.
* When the stroke is over 300 mm, the run-out of the ballscrew will occur. We recommend to low down the working speed under this circumstances.
* Acceleration and deacceleration value is set 0.2 second.
Electric Actuator for Clean Room – Robot Cylinder GCY5
Repeatability：±0.01(mm)
Ball Screw Lead：2/5/10/20(mm)
Maximum Speed ：100/250/500/1000(mm/s)
Maximum Payload (Horizontal)：30/30/15/10(kg)
Maximum Payload (Vertical)：10/10/5/2.5(kg)
Rated Thrust：854/341/170/85(N)
Stroke/Pitch ：50-600 / 50 mm Pitch.
* Acceleration and deacceleration value is set 0.2 second.
* If payload is near maximum , it requires to collocate externally with auxiliary guideway for bearing radial load.
Electric Actuator for Clean Room – Robot Cylinder GCY8
Repeatability：±0.01(mm)
Ball Screw Lead：5/10/20(mm)
Maximum Speed ：250/500/1000(mm/s)
Maximum Payload (Horizontal)：50/30/18(kg)
Maximum Payload (Vertical)：15/8/3(kg)
Rated Thrust：1388/694/347(N)
Stroke/Pitch ：50-800 / 50 mm Pitch.
* Acceleration and deacceleration value is set 0.2 second.
* When the stroke is 750mm , the run-out of ballscrew will ouucr. We recommend to low down the working speed under this circumstances.
Electric Actuator for Clean Room – Robot Cylinder GCY12
Repeatability：±0.01(mm)
Ball Screw Lead：5/10/20/32(mm)
Maximum Speed ：250/500/1000/1600(mm/s)
Maximum Payload (Horizontal)：110/88/40/30(kg)
Maximum Payload (Vertical)：33/22/10/8(kg)
Rated Thrust：1388/694/347/218(N)
Stroke/Pitch ：50-800 / 50 mm Pitch.
* Acceleration and deacceleration value is set 0.2 second.
* If payload is near maximum , it requires to collocate externally with auxiliary guideway for bearing radial load.
Electric Actuator for Clean Room – Robot Cylinder ECH14
● Ball screw
Outer dia & Precision grade：Ø16 & C7 Rolled Ballscrews (mm)
Lead: 5 / 10 / 20 / 32 (mm)
Maximum Rotating speed: 3600/ 3600 /3600 /3600 (rpm)
Maximum linear speed: 300 / 600 /1200 /1920 (mm/s)
Basic dynamic load rating Ca : 8042 / 6300 / 4152 / 7326 (N)
Basic static load rating Coa : 15088 / 11596 / 7439 / 14157 (N)
Load factor : 1.2/ 1.35 / 1.35 / 1.75
● Linear Guide
Dynamic horizontal / 100 Km of travel : 25832 (N)
Dynamic horizontal / 1000 Km of travel : 11991 (N)
Dynamic horizontal / 10000 Km of travel : 5565 (N)
Static horizontal : 58342 (N)
● Common Spec
Repeatability : ±0.005(mm)
Start torpue : 11 (N.cm)
Allowable input torque : 3.1 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-1050 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECH17
● Ball screw
Outer dia & Precision grade：Ø20 & C7 Rolled Ballscrews (mm)
Lead: 5 / 10 / 20 / 40 (mm)
Maximum Rotating speed: 3600/ 3600 /3600 /3600 (rpm)
Maximum linear speed: 300 / 600 /1200 /2400 (mm/s)
Basic dynamic load rating Ca : 13428 / 11224 / 5673 / 9654 (N)
Basic static load rating Coa : 29671 / 24457 / 11191 / 20271 (N)
Load factor : 1.2/ 1.35 / 1.35 / 1.75
● Linear Guide
Dynamic horizontal / 100 Km of travel : 40407 (N)
Dynamic horizontal / 1000 Km of travel : 18755 (N)
Dynamic horizontal / 10000 Km of travel : 8706 (N)
Static horizontal : 86491 (N)
● Common Spec
Repeatability : ±0.005(mm)
Start torpue : 14 (N.cm)
Allowable input torque : 4.5 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-1250 mm (50 increments)
Ambient temperature : 0-+40 °C.
Electric Actuator for Clean Room – Robot Cylinder ECH22
● Ball screw
Outer dia & Precision grade：Ø25& C7 Rolled Ballscrews (mm)
Lead: 5 / 10 / 25 / 40 (mm)
Maximum Rotating speed: 3600/ 3600 /3600 /3600 (rpm)
Maximum linear speed: 300 / 600 /1500 /2400 (mm/s)
Basic dynamic load rating Ca : 12048 / 11962 / 6153 / 9654 (N)
Basic static load rating Coa : 29725 / 29560 / 14032 / 20271 (N)
Load factor : 1.2/ 1.35 / 1.35 / 1.75
● Linear Guide
Dynamic horizontal / 100 Km of travel : 55747 (N)
Dynamic horizontal / 1000 Km of travel : 25876 (N)
Dynamic horizontal / 10000 Km of travel : 12010 (N)
Static horizontal : 119837 (N)
● Common Spec
Repeatability : ±0.005(mm)
Start torpue : 17 (N.cm)
Allowable input torque : 8.4 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-1500 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECH22M
● Ball screw
Outer dia & Precision grade：Ø20 & C7 Rolled Ballscrews (mm)
Lead: 5 / 10 / 20 / 40 (mm)
Maximum Rotating speed: 3600/ 3600 /3600 /3600 (rpm)
Maximum linear speed: 300 / 600 /1200 /2400 (mm/s)
Basic dynamic load rating Ca : 13428 / 11224 / 5673 / 9654 (N)
Basic static load rating Coa : 29671 / 24457 / 11191/ 20271 (N)
Load factor : 1.2/ 1.35 / 1.35 / 1.75
● Linear Guide
Dynamic horizontal / 100 Km of travel : 40407 (N)
Dynamic horizontal / 1000 Km of travel : 18755 (N)
Dynamic horizontal / 10000 Km of travel : 8706 (N)
Static horizontal : 86491(N)
● Common Spec
Repeatability : ±0.005(mm)
Start torpue : 17 (N.cm)
Allowable input torque : 8.4 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 850-2400 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECH17M
● Ball screw
Outer dia & Precision grade：Ø16 & 7 Rolled Ballscrews (mm)
Lead: 5 / 10 / 20 / 32 (mm)
Maximum Rotating speed: 3600/ 3600 /3600 /3600 (rpm)
Maximum linear speed: 300 / 600 /1200 /1920 (mm/s)
Basic dynamic load rating Ca : 8042 / 6300 / 4152 / 7326 (N)
Basic static load rating Coa : 15088 / 11596 / 7439 / 14157 (N)
Load factor : 1.2/ 1.35 / 1.35 / 1.75
● Linear Guide
Dynamic horizontal / 100 Km of travel : 25832 (N)
Dynamic horizontal / 1000 Km of travel : 11991 (N)
Dynamic horizontal / 10000 Km of travel : 5565 (N)
Static horizontal : 58342(N)
● Common Spec
Repeatability : ±0.005(mm)
Start torpue : 14 (N.cm)
Allowable input torque : 4.5 (N.m)
Maximum acceleration 10 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 800-2200 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECB5
Repeatability：±0.04(mm)
Ball Screw Lead：40(mm)
Maximum Speed：2000(mm/s)
Maximum Payload (Horizontal)：3(kg)
Maximum Payload (Vertical)：N/A(kg)
Rated Thrust：42(N)
Stroke/Pitch ：50-800 / 50 mm pitch
*Acceleration and deacceleration value is set 0.4 second.
Electric Actuator for Clean Room – Robot Cylinder ECB6
Repeatability：±0.04(mm)
Ball Screw Lead：40(mm)
Maximum Speed：2000(mm/s)
Maximum Payload (Horizontal)：3(kg)
Maximum Payload (Vertical)：N/A(kg)
Rated Thrust：42(N)
Stroke/Pitch ：50-800 / 50 mm pitch
*Acceleration and deacceleration value is set 0.4 second.
Electric Actuator for Clean Room – Robot Cylinder ECB10
● Belt
Lead: 32 (mm)
Maximum Rotating speed: 3600 (rpm)
Maximum linear speed: 1920 (mm/s)
Load factor : 1.75
Tis (Nominal Tension) : 99 (N)
Timax (Maximum Tension) : 195 (N)
● Linear Guide
Dynamic horizontal / 100 Km of travel : 12471 (N)
Dynamic horizontal / 1000 Km of travel : 5789 (N)
Dynamic horizontal / 10000 Km of travel : 2687 (N)
Static horizontal : 26695(N)
● Common Spec
Repeatability : ±0.04(mm)
Start torpue : 1.1(N.cm)
Maximum acceleration 5 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-2550 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECB14
● Belt
Lead: 40 (mm)
Maximum Rotating speed: 3600 (rpm)
Maximum linear speed: 2400 (mm/s)
Load factor : 1.75
Tis (Nominal Tension) : 137 (N)
Timax (Maximum Tension) : 261 (N)
● Linear Guide
Dynamic horizontal / 100 Km of travel : 25832 (N)
Dynamic horizontal / 1000 Km of travel : 11991 (N)
Dynamic horizontal / 10000 Km of travel : 5565 (N)
Static horizontal : 58342(N)
● Common Spec
Repeatability : ±0.04(mm)
Start torpue : 2.2 (N.cm)
Maximum acceleration 5 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-3050 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECB17
● Belt
Lead: 40 (mm)
Maximum Rotating speed: 3600 (rpm)
Maximum linear speed: 2400 (mm/s)
Load factor : 1.75
Tis (Nominal Tension) : 220 (N)
Timax (Maximum Tension) : 391 (N)
● Linear Guide
Dynamic horizontal / 100 Km of travel : 40407 (N)
Dynamic horizontal / 1000 Km of travel : 18755 (N)
Dynamic horizontal / 10000 Km of travel : 8706 (N)
Static horizontal : 86491(N)
● Common Spec
Repeatability : ±0.04(mm)
Start torpue : 4.5 (N.cm)
Maximum acceleration 5 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-4050 mm (50 increments)
Ambient temperature : 0-+40 °C
Electric Actuator for Clean Room – Robot Cylinder ECB22
● Belt
Lead: 40 (mm)
Maximum Rotating speed: 3600 (rpm)
Maximum linear speed: 2400 (mm/s)
Load factor : 1.75
Tis (Nominal Tension) : 376 (N)
Timax (Maximum Tension) : 651 (N)
● Linear Guide
Dynamic horizontal / 100 Km of travel : 55747 (N)
Dynamic horizontal / 1000 Km of travel : 25876 (N)
Dynamic horizontal / 10000 Km of travel : 12010 (N)
Static horizontal : 119837 (N)
● Common Spec
Repeatability : ±0.04(mm)
Start torpue : 8.4 (N.cm)
Maximum acceleration 5 (m/s2)
Frication coefficient : 0.03
Stroke (increments) : 50-3500 mm (50 increments)
Ambient temperature : 0-+40 °C
